Description
Innovacera supply the Porous ceramic plate/disc for Vacuum Chuck, which is mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation, and so on.
Only one size in stock (Dia200*T3mm, 15um), custom size is available.
Main Application field:
— New and refurbished, porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc. dicing saws and grinders.
— 6″, 8,” 12″ are regular sizes, And pore size include 15um, 30um, 50um, 100um.
Materials are alumina (Color: white, light brown, dark brown, blue-gray)
— Custom size (like square, oval shape, or irregular shapes) is available for us.
Characteristics include:
- High flatness and parallelism
- Compact and uniform microstructure with high strength
- Good permeability and uniform adsorption affinity
- Long lifetime
- Dressing easily.
The regular size in stock as follows:
| Regular size | 6, 8, 12 inches | |
| Regular Tolerance (Diameter, Length, Width) | +/-0.10mm | |
| Regular Flatness | +/-0.10mm | |
| Regular Surface Roughness | Ra0.8-1.6 | |
| Alumina (Al2O3) | Pore Size | Color |
| 15um | Light Brown | |
| 30um | Brown | |
| 50um | Blue-Gray | |
| 100um | Blue-Gray | |
Alumina Porous Ceramic material chemical composition and performance metrics:
| Properties | Unit | Pore Ceramic |
| Al2O3 Content | wt% | ≥ 80 |
| SiO2 Content | wt% | 16-18 |
| Density | g/cm3 | 2.3—2.5 |
| Hardness (HRA) | HRA ≥ | 50 |
| Flexure strength | MPa ≥ | 40 |
| Compressive Strength | MPa≥ | 600 |
| Porosity Factor | % | 40 |
| Work Pressure | MPa ≤ | 10 |
| Acid Resistance | mg/cm2 ≤ | 10.0 |
| Alkali Resistance | mg/cm2 ≤ | 20.0 |
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