PBN is a high-purity ceramic with excellent chemical resistance and strength at high temperatures. Pyrolytic Boron Nitride is used in crucibles to produce compound semiconductors and molecular-beam epitaxy, which make use of its characteristics. The extent of potential uses of PBN is expanding, and such uses include high functional PG/PBN heaters for semiconductor fields and CIGS based thin film for photovoltaic power generation.
Applications
1. Crucibles for compound semiconductor crystal production
2. Crucibles for MBE (Molecular Beam Epitaxy)
3. Heaters with Electrostatic Chuck function
4. Jigs and heaters used in the vacuum chamber at high temperature
5. Insulator for heaters