INNOVACERA® Al2O3 Micro-Porous Ceramic Plates
$400.00 – $780.00
Innovacera supply the Alumina Porous ceramic disc for Vacuum Chuck which are mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation and so on.
Main Appication field:
— New and refurbished alumina porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point etc dicing saws and grinders.
— 6″, 8,” 12″ are regular sizes, And pore size include 15 um, 30 um, 50 um, 100 um.
Materials are alumina (Color: white, light brown, dark brown, blue-gray)
— Custom size (like square, oval shape or irregular shapes) is available for us.
- High flatness and parallelism
- Compact and uniform microstructure with high strength
- Good permeability and uniform adsorption affinity
- Long life time
- Dressing easily.
The detailed regular size as below:
|Regular size||6, 8, 12 inches|
|Diameter Regular Tolerance||+/-0.10 mm|
|Regular Flatness||+/-0.05 mm|
|Regular Surface Roughness||Ra 0.8-1.6|
|Alumina (Al2O3)||Pore Size||Color|
|15 um||Light Brown|
Alumina Porous Ceramic material chemical composition and performance metrics:
|Al2O3 Content||wt%||≥ 80|
|Hardness (HRA)||HRA ≥||50|
|Flexure strength||MPa ≥||40|
|Work Pressure||MPa ≤||10|
|Acid Resistance||mg/cm2 ≤||10.0|
|Alkali Resistance||mg/cm2 ≤||20.0|