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INNOVACERA® Al2O3 Micro-Porous Ceramic Plates

$400.00$780.00

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SKU: PA6030 Category: Tag:

Description

Innovacera supply the Alumina Porous ceramic disc for Vacuum Chuck which are mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation and so on.

Main Appication field:
— New and refurbished alumina porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point etc dicing saws and grinders.
— 6″, 8,” 12″ are regular sizes, And pore size include 15 um, 30 um, 50 um, 100 um.
Materials are alumina (Color: white, light brown, dark brown, blue-gray)
— Custom size (like square, oval shape or irregular shapes) is available for us.

Characteristics include:

  1. High flatness and parallelism
  2. Compact and uniform microstructure with high strength
  3. Good permeability and uniform adsorption affinity
  4. Long life time
  5. Dressing easily.

The detailed regular size as below:

Regular size 6, 8, 12 inches
Diameter Regular Tolerance +/-0.10 mm
Regular Flatness +/-0.05 mm
Regular Surface Roughness Ra 0.8-1.6
Alumina (Al2O3) Pore Size Color
15 um Light Brown
30 um Brown
50 um Blue-Gray
100 um Blue-Gray

Alumina Porous Ceramic material chemical composition and performance metrics:

Properties Unit Pore  Ceramic
Al2O3  Content wt% ≥ 80
SiO2  Content wt% 16-18
Density g /cm3 2.3—2.5
Hardness (HRA) HRA ≥ 50
Flexure strength MPa ≥ 40
Compressive Strength MPa≥ 600
Porosity Factor % 40
Work Pressure MPa ≤ 10
Acid Resistance mg/cm2 ≤ 10.0
Alkali Resistance mg/cm2 ≤ 20.0

Additional information

Shape

Sphere

Material

Alumina (Al2O3)

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