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INNOVACERA® Al2O3 Micro-Porous Ceramic Circle Plates

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SKU: PA6030 Category: Tag:


Innovacera supply the Alumina Porous ceramic disc for Vacuum Chuck which is mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation, and so on.

Main Application field:
— New and refurbished alumina porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc dicing saws and grinders.
— 6″, 8,” 12″ are regular sizes, And pore size include 15 um, 30 um, 50 um, 100 um.
Materials are alumina (Color: white, light brown, dark brown, blue-gray)
— Custom size (like square, oval shape, or irregular shapes) is available for us.

Characteristics include:

  1. High flatness and parallelism
  2. Compact and uniform microstructure with high strength
  3. Good permeability and uniform adsorption affinity
  4. Long life time
  5. Dressing easily.

The detailed regular size as below:

Regular size 6, 8, 12 inches
Diameter Regular Tolerance +/-0.10 mm
Regular Flatness +/-0.10 mm
Regular Surface Roughness Ra 0.8-1.6
Alumina (Al2O3) Pore Size Color
15 um Light Brown
30 um Brown
50 um Blue-Gray
100 um Blue-Gray

Alumina Porous Ceramic material chemical composition and performance metrics:

Properties Unit Pore  Ceramic
Al2O3  Content wt% ≥ 80
SiO2  Content wt% 16-18
Density g /cm3 2.3—2.5
Hardness (HRA) HRA ≥ 50
Flexure strength MPa ≥ 40
Compressive Strength MPa≥ 600
Porosity Factor % 40
Work Pressure MPa ≤ 10
Acid Resistance mg/cm2 ≤ 10.0
Alkali Resistance mg/cm2 ≤ 20.0

Additional information




Alumina (Al2O3)

1 review for INNOVACERA® Al2O3 Micro-Porous Ceramic Circle Plates

  1. Elana

    We have been testing the plates.  At this point, it seems that the 30um plates are working the best for our application. The size of the plates is perfect.

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