Innovacera supply the Alumina Porous ceramic disc for Vacuum Chuck which is mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation, and so on.
Main Application field:
— New and refurbished alumina porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc dicing saws and grinders.
— 6″, 8,” 12″ are regular sizes, And pore size include 15 um, 30 um, 50 um, 100 um.
Materials are alumina (Color: white, light brown, dark brown, blue-gray)
— Custom size (like square, oval shape, or irregular shapes) is available for us.
- High flatness and parallelism
- Compact and uniform microstructure with high strength
- Good permeability and uniform adsorption affinity
- Long life time
- Dressing easily.
The detailed regular size as below:
|Regular size||6, 8, 12 inches|
|Diameter Regular Tolerance||+/-0.10 mm|
|Regular Flatness||+/-0.10 mm|
|Regular Surface Roughness||Ra 0.8-1.6|
|Alumina (Al2O3)||Pore Size||Color|
|15 um||Light Brown|
Alumina Porous Ceramic material chemical composition and performance metrics:
|Al2O3 Content||wt%||≥ 80|
|Hardness (HRA)||HRA ≥||50|
|Flexure strength||MPa ≥||40|
|Work Pressure||MPa ≤||10|
|Acid Resistance||mg/cm2 ≤||10.0|
|Alkali Resistance||mg/cm2 ≤||20.0|
We have been testing the plates. At this point, it seems that the 30um plates are working the best for our application. The size of the plates is perfect.