skip to Main Content

INNOVACERA® Porous Ceramic Disc for Vacuum Chuck, Dia200*T3mm, 15um

Rated 0 out of 5
(be the first to review)


8 in stock

SKU: PA6030200 Category: Tag:


Innovacera supply the Porous ceramic plate/disc for Vacuum Chuck, which is mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation, and so on.

Only one size in stock (Dia200*T3mm, 15um), custom size is available.

Main Application field:
— New and refurbished, porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc. dicing saws and grinders.

— 6″, 8,” 12″ are regular sizes, And pore size include 15um, 30um, 50um, 100um.

Materials are alumina (Color: white, light brown, dark brown, blue-gray)

— Custom size (like square, oval shape, or irregular shapes) is available for us.

Characteristics include:

  1. High flatness and parallelism
  2. Compact and uniform microstructure with high strength
  3. Good permeability and uniform adsorption affinity
  4. Long lifetime
  5. Dressing easily.

The regular size in stock as follows:

Regular size 6, 8, 12 inches
Regular Tolerance (Diameter, Length, Width) +/-0.10mm
Regular Flatness +/-0.10mm
Regular Surface Roughness Ra0.8-1.6
Alumina (Al2O3) Pore Size Color
15um Light Brown
30um Brown
50um Blue-Gray
100um Blue-Gray

Alumina Porous Ceramic material chemical composition and performance metrics:

Properties Unit Pore  Ceramic
Al2O3  Content wt% ≥ 80
SiO2  Content wt% 16-18
Density g/cm3 2.3—2.5
Hardness (HRA) HRA ≥ 50
Flexure strength MPa ≥ 40
Compressive Strength MPa≥ 600
Porosity Factor % 40
Work Pressure MPa ≤ 10
Acid Resistance mg/cm2 ≤ 10.0
Alkali Resistance mg/cm2 ≤ 20.0



There are no reviews yet.

Leave a customer review

Your email address will not be published. Required fields are marked *

Back To Top