Innovacera uses its deep ceramics expertise and process capabilities to manufacture ceramics with precisely controlled porosity. Porous ceramics are often used for chemical filtration and fluid separation.
The range of Innovacera porous ceramics is made from aluminum oxide and silicon carbide. The strong, uniform porous ceramic has 40-50% open porosity with a tortuous pore structure and is available in pore sizes ranging from 1 to 100 microns.
Three Main Application of Porous Ceramic:
- Vacuum Chuck, like scribing machine vacuum chuck, silicon wafer vacuum chuck.
- Adsorption platform.
- Suspension platform.
Especially, they are widely used for the semiconductor industry, like LED wafer processing.
The micro-porous ceramic working disk is a special tool for adsorption and bearing in various semiconductor wafer production processes, and is applied to processes such as thinning, dicing, cleaning, and handling.
They can be used with Japan, Germany, Israel, the United States, and domestic equipment, like Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point.
The detailed regular size as below:
|Regular size||6*6, 8*8, 12*12 inches|
|Regular Tolerance (Length, Width)||+/-0.10 mm|
|Regular Flatness||+/-0.10 mm|
|Regular Surface Roughness||Ra 0.8-1.6|
|Alumina (Al2O3)||Pore Size||Color|
Alumina Porous Ceramic material chemical composition and performance metrics:
|Al2O3 Content||wt%||≥ 80|
|Hardness (HRA)||HRA ≥||50|
|Flexure strength||MPa ≥||40|
|Work Pressure||MPa ≤||10|
|Acid Resistance||mg/cm2 ≤||10.0|
|Alkali Resistance||mg/cm2 ≤||20.0|