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INNOVACERA Al2O3 Micro-Porous Ceramic Square Plate

4.67 (2 reviews)



SKU: PA6031 Category: Tag:


Innovacera uses its deep ceramics expertise and process capabilities to manufacture ceramics with precisely controlled porosity. Porous ceramics are often used for chemical filtration and fluid separation.

The range of Innovacera porous ceramics is made from aluminum oxide and silicon carbide. The strong, uniform porous ceramic has 40-50% open porosity with a tortuous pore structure and is available in pore sizes ranging from 1 to 100 microns.

Three Main Application of Porous Ceramic:

  • Vacuum Chuck, like scribing machine vacuum chuck, silicon wafer vacuum chuck.
  • Adsorption platform.
  • Suspension platform.

Especially, they are widely used for the semiconductor industry, like LED wafer processing.

The micro-porous ceramic working disk is a special tool for adsorption and bearing in various semiconductor wafer production processes, and is applied to processes such as thinning, dicing, cleaning, and handling.

They can be used with Japan, Germany, Israel, the United States, and domestic equipment, like Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point.

The detailed regular size as below:

Regular size 6*6, 8*8, 12*12 inches
Regular Tolerance (Length, Width) +/-0.10 mm
Regular Flatness +/-0.10 mm
Regular Surface Roughness Ra 0.8-1.6
Alumina (Al2O3) Pore Size Color
15um Light Brown
30um Brown
50um Blue-Gray
100um Blue-Gray

Alumina Porous Ceramic material chemical composition and performance metrics:

Properties Unit Pore  Ceramic
Al2O3  Content wt% ≥ 80
SiO2  Content wt% 16-18
Density g /cm3 2.3-2.5
Hardness (HRA) HRA ≥ 50
Flexure strength MPa ≥ 40
Compressive Strength MPa≥ 600
Porosity Factor % 40
Work Pressure MPa ≤ 10
Acid Resistance mg/cm2 ≤ 10.0
Alkali Resistance mg/cm2 ≤ 20.0

Additional information


Alumina (Al2O3)



2 reviews for INNOVACERA Al2O3 Micro-Porous Ceramic Square Plate

  1. Tony

    We got the porous ceramic plates and already test them. The test result is OK! We are very satisfied.

  2. Susan

    We are very happy with your porous ceramic plates and use them every day. 

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